00353nam a2200109Ia 4500008004100000082002200041100001900063245006000082260003500142300001000177650005600187211119s9999||||xx |||||||||||||| ||und||  a543.002 84bOHR-M  aOhring, Milton 0aMaterials Science Ofthin Films:Deposition and Structure  bAcademic Pressa2002cNew York  axxi+7  aSciencevAnalytical chemistryPhysicsxGeneral Stack