TY  - BOOK
AU  - Ohring, Milton
TI  - Materials Science Ofthin Films:Deposition and Structure
U1  - 543.002 84 
PY  - 0000///New York
CY  - 2002
PB  - Academic Press
KW  - Science
KW  - Analytical chemistryPhysics
KW  - General Stack
ER  -