000			00431nam a2200133Ia 4500
008			211119s9999||||xx |||||||||||||| ||und||
082			_a620.5 _bFAH-N
100			_aFahrner, W R
245		0	_aNanotechnology and Nanoelectronics:materials, Devices, Measurement Techniques
260			_bSpringer _a1965 _cVerlag London
300			_axvi+2
650			_aTechnology _vEngineering &allied operationPhysics _xGeneral Stack
942			_cBOOK
999			_c116061 _d116061