000			00405nam a2200133Ia 4500
008			211119s9999||||xx |||||||||||||| ||und||
082			_a543.002 84 _bOHR-M
100			_aOhring, Milton
245		0	_aMaterials Science Ofthin Films:Deposition and Structure
260			_bAcademic Press _a2002 _cNew York
300			_axxi+7
650			_aScience _vAnalytical chemistryPhysics _xGeneral Stack
942			_cBOOK
999			_c116062 _d116062