000 00503nam a22002057a 4500
003 OSt
005 20260610153120.0
008 260610b |||||||| |||| 00| 0 eng d
020 _a81-8147-985-8
040 _cSBCL
082 _a821.55
100 _aHoffman,Dorothy M
245 _aHandbook of Vacuum Science
260 _aNew Delhi
_bElsevier
_c2005
300 _a835p.
630 _xTechnology
650 _aEngineering & allied operations
650 _aApplied physics
942 _cBOOK
999 _c138469
_d138469