| 000 | 00503nam a22002057a 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20260610153120.0 | ||
| 008 | 260610b |||||||| |||| 00| 0 eng d | ||
| 020 | _a81-8147-985-8 | ||
| 040 | _cSBCL | ||
| 082 | _a821.55 | ||
| 100 | _aHoffman,Dorothy M | ||
| 245 | _aHandbook of Vacuum Science | ||
| 260 |
_aNew Delhi _bElsevier _c2005 |
||
| 300 | _a835p. | ||
| 630 | _xTechnology | ||
| 650 | _aEngineering & allied operations | ||
| 650 | _aApplied physics | ||
| 942 | _cBOOK | ||
| 999 |
_c138469 _d138469 |
||